Name : Spectroscopic Ellipsometer VASE
Make : J.A. Wollam Co. Inc.
Model : V-VASE
Application :

• Optical constants
• Thin film thickness
• Doping concentration
• Surface and interfacial roughness
• Alloy ration
• Crystallinity
• Optical anisotropy
• Depth profile of material properties
• Growth or Etch rate (in-situ)
• Temperature (in-situ)